9/26/2011	1:51:27 PM	Main Vac valve closed
9/26/2011	3:02:37 PM	Bypass valve opened
9/26/2011	3:05:09 PM	Bypass valve closed
9/26/2011	3:05:10 PM	Main Vac valve opened
9/26/2011	3:13:09 PM	Main Vac valve closed
9/26/2011	3:13:17 PM	Main Vac valve opened
9/26/2011	3:23:40 PM	Main Vac valve closed
9/26/2011	3:23:47 PM	Main Vac valve opened
9/26/2011	3:31:28 PM	Main Vac valve closed
9/26/2011	3:31:33 PM	Main Vac valve opened
9/26/2011	3:44:35 PM	Main Vac valve closed
9/26/2011	3:44:40 PM	Main Vac valve opened
9/26/2011	4:14:24 PM	Main Vac valve closed
9/26/2011	4:14:32 PM	Main Vac valve opened
9/26/2011	4:18:46 PM	Main Vac valve closed
9/26/2011	4:21:19 PM	Main Vac valve opened
9/26/2011	4:22:15 PM	Main Vac valve closed
9/26/2011	4:22:21 PM	Main Vac valve opened
9/26/2011	4:29:22 PM	Main Vac valve closed
9/26/2011	4:44:38 PM	Helium valve closed
9/26/2011	4:44:38 PM	H2 valve closed
9/26/2011	4:44:38 PM	BCl3 valve closed
9/26/2011	4:44:38 PM	PH3 valve closed
9/26/2011	4:44:38 PM	SiCl4 pre valve closed
9/26/2011	4:44:38 PM	SiCl4 post valve closed
9/26/2011	4:44:38 PM	Main Vac valve closed
9/26/2011	4:44:38 PM	Bubbler valve closed
9/26/2011	4:44:38 PM	Bypass valve closed
9/26/2011	4:44:38 PM	Helium MFC set to  0.000000
9/26/2011	4:44:38 PM	H2 MFC set to  0.000000
9/26/2011	4:44:38 PM	BCl3 MFC set to  0.000000
9/26/2011	4:44:38 PM	PHl3 MFC set to  0.000000
9/26/2011	4:44:38 PM	SiCl4 MFC set to  0.000000
9/26/2011	4:44:38 PM	Bypass solenoid MFC set to  760.000000
9/26/2011	4:44:38 PM	Tube furnace set to 0
9/26/2011	4:44:38 PM	Baratron reads 1062.879148 Torr.  Emergency exit.
9/26/2011	4:44:46 PM	Program exited cleanly
9/26/2011	4:44:49 PM	Program started normally
9/26/2011	4:44:50 PM	Helium valve closed
9/26/2011	4:44:50 PM	H2 valve closed
9/26/2011	4:44:50 PM	BCl3 valve closed
9/26/2011	4:44:50 PM	PH3 valve closed
9/26/2011	4:44:50 PM	SiCl4 pre valve closed
9/26/2011	4:44:50 PM	SiCl4 post valve closed
9/26/2011	4:44:50 PM	Main Vac valve closed
9/26/2011	4:44:50 PM	Bypass valve closed
9/26/2011	4:44:50 PM	Bubbler valve closed
9/26/2011	4:44:50 PM	Helium MFC set to  0.000000
9/26/2011	4:44:50 PM	H2 MFC set to  0.000000
9/26/2011	4:44:50 PM	BCl3 MFC set to  0.000000
9/26/2011	4:44:50 PM	PHl3 MFC set to  0.000000
9/26/2011	4:44:50 PM	SiCl4 MFC set to  0.000000
9/26/2011	4:44:50 PM	Bypass solenoid MFC set to  760.000000
9/26/2011	4:44:50 PM	Tube furnace set to 0
9/26/2011	4:44:56 PM	Bypass valve opened
9/26/2011	4:46:25 PM	Bypass valve closed
9/26/2011	4:46:25 PM	Main Vac valve opened
9/26/2011	5:15:46 PM	Main Vac valve closed
9/26/2011	5:20:25 PM	Bypass valve opened
9/26/2011	5:22:23 PM	Bypass valve closed
9/26/2011	5:22:24 PM	Main Vac valve opened
9/26/2011	5:23:47 PM	Main Vac valve closed
9/26/2011	5:41:58 PM	Bypass valve opened
9/26/2011	5:44:27 PM	Bypass valve closed
9/26/2011	5:44:30 PM	Main Vac valve opened
9/26/2011	5:59:53 PM	Main Vac valve closed
9/26/2011	6:00:07 PM	Main Vac valve opened
9/26/2011	6:06:19 PM	H2 MFC set to  10.000000
9/26/2011	6:06:24 PM	H2 valve opened
9/26/2011	6:06:25 PM	H2 valve closed
9/26/2011	6:07:27 PM	Main Vac valve closed
9/26/2011	6:07:37 PM	Main Vac valve opened
9/26/2011	6:07:39 PM	H2 valve opened
9/26/2011	6:07:58 PM	H2 valve closed
9/26/2011	6:08:47 PM	H2 valve opened
9/26/2011	6:09:14 PM	H2 valve closed
9/26/2011	6:09:51 PM	H2 valve opened
9/26/2011	6:10:10 PM	H2 valve closed
9/26/2011	6:17:50 PM	Tube furnace set to 60
9/26/2011	6:18:28 PM	H2 valve opened
9/26/2011	6:18:47 PM	H2 valve closed
9/26/2011	7:27:59 PM	Main Vac valve closed
9/26/2011	7:28:07 PM	Main Vac valve opened
9/26/2011	7:28:39 PM	H2 valve opened
9/26/2011	7:29:00 PM	H2 valve closed
9/26/2011	7:29:04 PM	H2 MFC set to  200.000000
9/26/2011	7:29:15 PM	Main Vac valve closed
9/26/2011	7:29:16 PM	H2 valve opened
9/26/2011	7:29:54 PM	Bypass valve opened
9/26/2011	7:29:56 PM	H2 valve closed
9/26/2011	7:30:42 PM	Bypass valve closed
9/26/2011	7:30:43 PM	Main Vac valve opened
9/26/2011	7:33:06 PM	H2 MFC set to  500.000000
9/26/2011	7:33:08 PM	Main Vac valve closed
9/26/2011	7:33:09 PM	H2 valve opened
9/26/2011	7:33:19 PM	Tube furnace set to 70
9/26/2011	7:33:47 PM	H2 valve closed
9/26/2011	7:33:48 PM	Bypass valve opened
9/26/2011	7:34:41 PM	Bypass valve closed
9/26/2011	7:34:42 PM	Main Vac valve opened
9/26/2011	7:36:18 PM	Main Vac valve closed
9/26/2011	7:36:19 PM	H2 valve opened
9/26/2011	7:36:40 PM	H2 valve closed
9/26/2011	7:36:41 PM	Bypass valve opened
9/26/2011	7:37:29 PM	Bypass valve closed
9/26/2011	7:37:30 PM	Main Vac valve opened
9/26/2011	7:37:35 PM	H2 MFC set to  10.000000
9/26/2011	8:42:14 PM	H2 MFC set to  500.000000
9/26/2011	8:42:15 PM	Main Vac valve closed
9/26/2011	8:42:16 PM	H2 valve opened
9/26/2011	8:42:59 PM	Bypass valve opened
9/26/2011	8:43:58 PM	Bypass valve closed
9/26/2011	8:43:58 PM	Main Vac valve opened
9/26/2011	8:44:03 PM	Tube furnace set to 85
9/26/2011	8:58:43 PM	Main Vac valve closed
9/26/2011	8:58:49 PM	Main Vac valve opened
9/26/2011	8:59:09 PM	H2 valve closed
9/26/2011	8:59:56 PM	Main Vac valve closed
9/26/2011	9:00:03 PM	Main Vac valve opened
9/26/2011	9:00:13 PM	Tube furnace set to 0
9/26/2011	9:47:49 PM	H2 valve opened
9/26/2011	9:48:07 PM	H2 valve closed
9/26/2011	9:48:11 PM	H2 valve opened
9/26/2011	9:48:23 PM	H2 valve closed
